{"id":25689,"date":"2020-09-10T17:55:45","date_gmt":"2020-09-10T08:55:45","guid":{"rendered":"https:\/\/www.kisco.co\/?page_id=25689"},"modified":"2021-01-26T14:04:16","modified_gmt":"2021-01-26T05:04:16","slug":"%eb%b0%98%eb%8f%84%ec%b2%b4","status":"publish","type":"page","link":"https:\/\/www.kisco.co\/ko\/%ec%82%ac%ec%97%85%ec%98%81%ec%97%ad\/%ec%9c%a0%ea%b8%b0-%ec%9e%ac%eb%a3%8c\/%eb%b0%98%eb%8f%84%ec%b2%b4\/","title":{"rendered":"\ubc18\ub3c4\uccb4"},"content":{"rendered":"<p><div class=\"fusion-fullwidth fullwidth-box fusion-builder-row-1 fusion-flex-container hundred-percent-fullwidth non-hundred-percent-height-scrolling\" style=\"--awb-border-radius-top-left:0px;--awb-border-radius-top-right:0px;--awb-border-radius-bottom-right:0px;--awb-border-radius-bottom-left:0px;--awb-padding-right:0px;--awb-padding-bottom:0px;--awb-padding-left:0px;--awb-margin-top:-90px;--awb-margin-bottom:0px;--awb-flex-wrap:wrap;\" ><div class=\"fusion-builder-row fusion-row fusion-flex-align-items-flex-start fusion-flex-content-wrap\" style=\"width:104% !important;max-width:104% !important;margin-left: calc(-4% \/ 2 );margin-right: calc(-4% \/ 2 );\"><div class=\"fusion-layout-column fusion_builder_column fusion-builder-column-0 fusion_builder_column_1_1 1_1 fusion-flex-column\" style=\"--awb-bg-image:url(&#039;https:\/\/www.kisco.co\/wp-content\/uploads\/2020\/09\/Semiconductor.jpg&#039;);--awb-bg-size:cover;--awb-width-large:100%;--awb-margin-top-large:0px;--awb-spacing-right-large:1.92%;--awb-margin-bottom-large:0px;--awb-spacing-left-large:1.92%;--awb-width-medium:100%;--awb-order-medium:0;--awb-spacing-right-medium:1.92%;--awb-spacing-left-medium:1.92%;--awb-width-small:100%;--awb-order-small:0;--awb-spacing-right-small:1.92%;--awb-spacing-left-small:1.92%;\"><div class=\"fusion-column-wrapper fusion-column-has-shadow fusion-flex-justify-content-flex-start fusion-content-layout-column fusion-empty-column-bg-image fusion-column-has-bg-image\" data-bg-url=\"https:\/\/www.kisco.co\/wp-content\/uploads\/2020\/09\/Semiconductor.jpg\"><img decoding=\"async\" class=\"fusion-empty-dims-img-placeholder\" aria-label=\"Semiconductor\" src=\"data:image\/svg+xml,%3Csvg%20xmlns%3D%27http%3A%2F%2Fwww.w3.org%2F2000%2Fsvg%27%20width%3D%271920%27%20height%3D%27500%27%20viewBox%3D%270%200%201920%20500%27%3E%3Crect%20width%3D%271920%27%20height%3D%27500%27%20fill-opacity%3D%220%22%2F%3E%3C%2Fsvg%3E\"><\/div><\/div><\/div><\/div><div class=\"fusion-fullwidth fullwidth-box fusion-builder-row-2 fusion-flex-container nonhundred-percent-fullwidth non-hundred-percent-height-scrolling\" style=\"--awb-border-radius-top-left:0px;--awb-border-radius-top-right:0px;--awb-border-radius-bottom-right:0px;--awb-border-radius-bottom-left:0px;--awb-margin-top:-125px;--awb-margin-bottom:10px;--awb-flex-wrap:wrap;\" ><div class=\"fusion-builder-row fusion-row fusion-flex-align-items-flex-start fusion-flex-content-wrap\" style=\"max-width:1144px;margin-left: calc(-4% \/ 2 );margin-right: calc(-4% \/ 2 );\"><div class=\"fusion-layout-column fusion_builder_column fusion-builder-column-1 fusion_builder_column_1_1 1_1 fusion-flex-column\" style=\"--awb-bg-size:cover;--awb-width-large:100%;--awb-margin-top-large:0px;--awb-spacing-right-large:1.92%;--awb-margin-bottom-large:0px;--awb-spacing-left-large:1.92%;--awb-width-medium:100%;--awb-order-medium:0;--awb-spacing-right-medium:1.92%;--awb-spacing-left-medium:1.92%;--awb-width-small:100%;--awb-order-small:0;--awb-spacing-right-small:1.92%;--awb-spacing-left-small:1.92%;\"><div class=\"fusion-column-wrapper fusion-column-has-shadow fusion-flex-justify-content-flex-start fusion-content-layout-column\"><div class=\"fusion-text fusion-text-1\"><h1><b style=\"font-size: 90px; color: #ffffff;\" data-fusion-font=\"true\">\ubc18\ub3c4\uccb4<\/b><\/h1>\n<\/div><\/div><\/div><div class=\"fusion-layout-column fusion_builder_column fusion-builder-column-2 fusion_builder_column_1_1 1_1 fusion-flex-column\" style=\"--awb-padding-top:30px;--awb-padding-right:50px;--awb-padding-bottom:30px;--awb-padding-left:50px;--awb-bg-color:#f7f7f7;--awb-bg-color-hover:#f7f7f7;--awb-bg-size:cover;--awb-width-large:100%;--awb-order-large:0;--awb-margin-top-large:0px;--awb-spacing-right-large:1.92%;--awb-margin-bottom-large:30px;--awb-spacing-left-large:1.92%;--awb-width-medium:100%;--awb-order-medium:0;--awb-spacing-right-medium:1.92%;--awb-spacing-left-medium:1.92%;--awb-width-small:100%;--awb-order-small:0;--awb-spacing-right-small:1.92%;--awb-spacing-left-small:1.92%;\"><div class=\"fusion-column-wrapper fusion-column-has-shadow fusion-flex-justify-content-flex-start fusion-content-layout-column\"><div class=\"fusion-text fusion-text-2\"><p style=\"font-size: 17px; line-height: 28px;\" data-fusion-font=\"true\">\ubc18\ub3c4\uccb4 Photoresist\uc758 \uad6c\uc131 \uc131\ubd84 \ubc0f Photoresist\uc758 Coating\uc744 \uc704\ud55c \uc18c\uc7ac\ub97c \ud569\uc131 \uae30\uc220\uc744 \ud1b5\ud574 \uac1c\ubc1c\ud558\uc5ec \uc0dd\uc0b0\u30fb\uacf5\uae09\ud558\uace0 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n<p style=\"font-size: 17px; line-height: 28px;\" data-fusion-font=\"true\">\ubc18\ub3c4\uccb4 Photoresist\ub294 Polymer, PAG, Solvent\uc640 Additive\ub85c \uad6c\uc131\ub418\uc5b4 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n<\/div><\/div><\/div><\/div><\/div><div class=\"fusion-fullwidth fullwidth-box fusion-builder-row-3 nonhundred-percent-fullwidth non-hundred-percent-height-scrolling\" style=\"--awb-background-position:left top;--awb-border-sizes-top:0px;--awb-border-sizes-bottom:0px;--awb-border-sizes-left:0px;--awb-border-sizes-right:0px;--awb-border-radius-top-left:0px;--awb-border-radius-top-right:0px;--awb-border-radius-bottom-right:0px;--awb-border-radius-bottom-left:0px;--awb-padding-top:20px;--awb-padding-right:7%;--awb-padding-bottom:20px;--awb-padding-left:7%;--awb-flex-wrap:wrap;\" ><div class=\"fusion-builder-row fusion-row\"><div class=\"fusion-layout-column fusion_builder_column fusion-builder-column-3 fusion_builder_column_1_1 1_1 fusion-one-full fusion-column-first fusion-column-last\" style=\"--awb-bg-size:cover;\"><div class=\"fusion-column-wrapper fusion-column-has-shadow fusion-flex-column-wrapper-legacy\"><div class=\"fusion-tabs fusion-tabs-1 clean vertical-tabs icon-position-left mobile-mode-accordion\" style=\"--awb-title-border-radius-top-left:0px;--awb-title-border-radius-top-right:0px;--awb-title-border-radius-bottom-right:0px;--awb-title-border-radius-bottom-left:0px;--awb-inactive-color:#ebeaea;--awb-background-color:#ffffff;--awb-border-color:#ebeaea;--awb-active-border-color:#3963a7;\"><div class=\"nav\"><ul class=\"nav-tabs\" role=\"tablist\"><li class=\"active\" role=\"presentation\"><a class=\"tab-link\" data-toggle=\"tab\" role=\"tab\" aria-controls=\"tab-4b78b367c990f817162\" aria-selected=\"true\" id=\"fusion-tab-\ubc18\ub3c4\uccb4lithography\uc18c\uc7ac\" href=\"#tab-4b78b367c990f817162\"><h4 class=\"fusion-tab-heading\">\ubc18\ub3c4\uccb4 Lithography \uc18c\uc7ac<\/h4><\/a><\/li><\/ul><\/div><div class=\"tab-content\"><div class=\"nav fusion-mobile-tab-nav\"><ul class=\"nav-tabs\" role=\"tablist\"><li class=\"active\" role=\"presentation\"><a class=\"tab-link\" data-toggle=\"tab\" role=\"tab\" aria-controls=\"tab-4b78b367c990f817162\" aria-selected=\"true\" id=\"mobile-fusion-tab-\ubc18\ub3c4\uccb4lithography\uc18c\uc7ac\" href=\"#tab-4b78b367c990f817162\"><h4 class=\"fusion-tab-heading\">\ubc18\ub3c4\uccb4 Lithography \uc18c\uc7ac<\/h4><\/a><\/li><\/ul><\/div><div class=\"tab-pane fade fusion-clearfix in active\" role=\"tabpanel\" tabindex=\"0\" aria-labelledby=\"fusion-tab-\ubc18\ub3c4\uccb4lithography\uc18c\uc7ac\" id=\"tab-4b78b367c990f817162\">\n<p><strong>ArF &amp; KrF Polymer<br \/><\/strong>\uae30\ub2a5\uc131 Monomer\uacb0\ud569\uc73c\ub85c \uc774\ub8e8\uc5b4\uc9c4 Polymer\ub85c Photoresist Coating \ubc0f \ub178\uad11 \uacf5\uc815\ud6c4 Pattern\uc744 \uad6c\ud604\ud558\ub294 \uc5ed\ud560\uc744 \ud558\uba70,\u00a0\ub2f9\uc0ac\uc5d0\uc11c\ub294 \uace0\uac1d\uc0ac \uc694\uad6c\uc0ac\ud56d\uc5d0 \ub9de\ucd98 \uc6b0\uc218\ud55c \ud488\uc9c8\uc758 \uc81c\ud488\uc744 \uacf5\uae09\ud558\uace0 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n<p><strong>Photo Acid Generator (PAG)<br \/><\/strong>\ud2b9\uc815\ud55c \ud30c\uc7a5\uc758 \ube5b\uc744 \ubc1b\uc73c\uba74 \uc0b0\uc744 \ubc1c\uc0dd\ud558\ub294 PAG\ub97c \uc0dd\uc0b0\ud558\uace0 \uc788\uc2b5\ub2c8\ub2e4.<br \/>i-line, KrF, ArF Photoresist\uc5d0 \uc0ac\uc6a9\ub418\ub294 Sulfonium\uacc4, Iodonium\uacc4 \ub4f1\uc758 \ub2e4\uc591\ud55c PAG \uc81c\ud488\uc744 \uacf5\uae09\ud558\uace0 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n<p><strong><span lang=\"EN-US\">Bottom Anti-Reflection Coating(BARC)<\/span><span lang=\"KO\">\uc6a9\u00a0<\/span><span lang=\"EN-US\">Resin<br \/><\/span><\/strong>\ubc18\ub3c4\uccb4 \ud3ec\ud1a0\uacf5\uc815 \uc911 \ub178\uad11\uc2dc \ud558\ubd80\ub9c9\uce35\uc5d0 \uc758\ud55c \ube5b\uc758 \ubc18\uc0ac\ub97c \ubc29\uc9c0\ud558\ub294 \uc5ed\ud560\uc744 \ud558\ub294 \ubc18\uc0ac\ubc29\uc9c0\ub9c9\uc6a9 Polymer\ub85c i-line BARC, ArF BARC, KrF BARC\uc6a9Resin\uc744 \uc0dd\uc0b0 \u30fb \uacf5\uae09\ud558\uace0 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n<p><strong>Monomer<br \/><\/strong>Polymer\ub97c \ub9cc\ub4e4\uae30 \uc704\ud55c \ubb3c\uc9c8\ub85c \uac00\uaca9 \uacbd\uc7c1\ub825 \ud655\ubcf4 \ubc0f \uc790\uccb4 \ud488\uc9c8 \uc548\uc815\ud654\ub97c \uc704\ud574 \uc0dd\uc0b0\ud558\uace0 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n<p>\u00a0<\/p>\n<table width=\"100%\">\n<thead>\n<tr>\n<th align=\"left\" width=\"20%\">\u00a0<\/th>\n<th align=\"left\" width=\"60%\"><img decoding=\"async\" class=\"alignnone size-full wp-image-26247\" src=\"https:\/\/www.kisco.co\/wp-content\/uploads\/2020\/09\/Semiconductor-1.jpg\" alt=\"\" width=\"1500\" height=\"1000\" srcset=\"https:\/\/www.kisco.co\/wp-content\/uploads\/2020\/09\/Semiconductor-1-200x133.jpg 200w, https:\/\/www.kisco.co\/wp-content\/uploads\/2020\/09\/Semiconductor-1-300x200.jpg 300w, https:\/\/www.kisco.co\/wp-content\/uploads\/2020\/09\/Semiconductor-1-400x267.jpg 400w, https:\/\/www.kisco.co\/wp-content\/uploads\/2020\/09\/Semiconductor-1-600x400.jpg 600w, https:\/\/www.kisco.co\/wp-content\/uploads\/2020\/09\/Semiconductor-1-768x512.jpg 768w, https:\/\/www.kisco.co\/wp-content\/uploads\/2020\/09\/Semiconductor-1-800x533.jpg 800w, https:\/\/www.kisco.co\/wp-content\/uploads\/2020\/09\/Semiconductor-1-1024x683.jpg 1024w, https:\/\/www.kisco.co\/wp-content\/uploads\/2020\/09\/Semiconductor-1-1200x800.jpg 1200w, https:\/\/www.kisco.co\/wp-content\/uploads\/2020\/09\/Semiconductor-1.jpg 1500w\" sizes=\"(max-width: 1500px) 100vw, 1500px\" \/><\/th>\n<th align=\"left\" width=\"20%\">\u00a0<\/th>\n<\/tr>\n<\/thead>\n<\/table>\n<\/div><\/div><\/div><div class=\"fusion-clearfix\"><\/div><\/div><\/div><\/div><\/div><\/p>\n","protected":false},"excerpt":{"rendered":"","protected":false},"author":8,"featured_media":0,"parent":25571,"menu_order":2,"comment_status":"open","ping_status":"closed","template":"100-width.php","meta":{"_monsterinsights_skip_tracking":false,"_monsterinsights_sitenote_active":false,"_monsterinsights_sitenote_note":"","_monsterinsights_sitenote_category":0,"footnotes":""},"class_list":["post-25689","page","type-page","status-publish","hentry"],"aioseo_notices":[],"_links":{"self":[{"href":"https:\/\/www.kisco.co\/ko\/wp-json\/wp\/v2\/pages\/25689","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.kisco.co\/ko\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/www.kisco.co\/ko\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/www.kisco.co\/ko\/wp-json\/wp\/v2\/users\/8"}],"replies":[{"embeddable":true,"href":"https:\/\/www.kisco.co\/ko\/wp-json\/wp\/v2\/comments?post=25689"}],"version-history":[{"count":14,"href":"https:\/\/www.kisco.co\/ko\/wp-json\/wp\/v2\/pages\/25689\/revisions"}],"predecessor-version":[{"id":28377,"href":"https:\/\/www.kisco.co\/ko\/wp-json\/wp\/v2\/pages\/25689\/revisions\/28377"}],"up":[{"embeddable":true,"href":"https:\/\/www.kisco.co\/ko\/wp-json\/wp\/v2\/pages\/25571"}],"wp:attachment":[{"href":"https:\/\/www.kisco.co\/ko\/wp-json\/wp\/v2\/media?parent=25689"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}